IEDM 2010 article online

Article: IEDM 2010 Process Technology Update
By: slacker (s.delete@this.lack.er), February 15, 2011 7:15 pm
Room: Moderated Discussions
Good article.

Two questions about page 4:

1. What was the inductance of the inductor measured in figure 5?

2. Isn't the top metal 7um thick, not 8um ?
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IEDM 2010 article onlineDavid Kanter2011/02/15 02:59 AM
  IEDM 2010 article onlineRicardo B2011/02/15 06:54 AM
    IEDM 2010 article onlineDavid Kanter2011/02/15 10:37 AM
      IEDM 2010 article onlineRicardo B2011/02/15 04:03 PM
  IEDM 2010 article onlineslacker2011/02/15 07:15 PM
    IEDM 2010 article onlineIntelUser20002011/02/15 07:54 PM
    IEDM 2010 article onlineDavid Kanter2011/02/15 09:49 PM
      IEDM 2010 article onlineDavid Hess2011/02/16 03:40 AM
      IEDM 2010 article onlineRicardo B2011/02/16 08:01 AM
      IEDM 2010 article onlineIntelUser20002011/02/17 10:21 AM
        Answer: 8umslacker2011/02/17 11:01 AM
  IEDM 2010 article onlinesomeone2011/02/17 10:14 AM
  IEDM 2010 article onlineiz2011/02/17 07:31 PM
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      Also fixedDavid Kanter2011/02/17 08:47 PM
    IEDM 2010 article onlineDavid Kanter2011/02/17 08:43 PM
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