Some Intel 10nm+ details

By: jokerman (jo.delete@this.ker.man), August 9, 2020 11:58 am
Room: Moderated Discussions
A new paper from Intel: A Reliability Overview of Intel’s 10+ Logic Technology

Quote from the paper:

Intel’s 10+ process is an update to the previously described 10 nm process,
featuring improved transistor performance,
14 metal layers (vs. 13 metal layers),
and a higher-density multi-plate MIM capacitor.


- Transistor improvements are not further detailed
- The additional metal layer was added near the top of the stack (160 nm pitch)
- MIM cap now supports 4 plates (up to 141 fF/μm2, which is 3.5x of 14nm MIM cap)

but of course most of the paper deals with reliability.
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Some Intel 10nm+ detailsjokerman2020/08/09 11:58 AM
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