AMD discloses that its yield problem on the 130nm

Article: Coverage of IEDM 2003: Day 1
By: David Wang (dwang.delete@this.realworldtech.com), December 11, 2003 11:34 am
Room: Moderated Discussions
mas (mas769@hotmail.com) on 12/11/03 wrote:
---------------------------
>mas (mas769@hotmail.com) on 12/11/03 wrote:
>---------------------------
>>David Wang (dwang@realworldtech.com) on 12/10/03 wrote:
>>---------------------------
>>>mas (mas769@hotmail.com) on 12/10/03 wrote:
>>>---------------------------
>>>>"
>>>>AMD discloses that its yield problem on the 130nm SOI process was due to the integration
>>>>of Low-K materials into the process rather than SOI.
>>>>"
>>>>
>>>>Now that is the killer line that will get you hits and looky sees all around the Web, lol.
>>>
>>
>>http://www.siliconinvestor.com/stocktalk/msg.gsp?msgid=19584598
>>
>>told you. :-). In fact I think yours was a Web exclusive.

I find it surprsing that I didn't run into any from time EE Times. Perhaps budget constraints? There were some reporters, but mostly those interested in the business implication of technology side of things. One reporter was asking why the same conference would trumpet both low-K and high-K material. He apparently didn't realized that they were to be used in different places. :)

>>>AMD also talked about a few things like how they gradually modified the gate structure
>>>for SOI until it finally achieved the performance they were expecting. Apparently
>>>the transplanted gate structure performed rather sub-optimally.
>>>
>>>AMD had some nice slides, and I've asked to see if I can get them to include with
>>>the article. However, the presenter won't be back in Germany until after the 19th.
>>>I'll either have to wait and see if he'll send the slides or just write it up without the slides.
>>>
>>>According to the presenter, AMD was seeing quite a bit of defects from the edges
>>>of wafers, since the adhesion of the metal stack was sub-optimal. They were in fact
>>>flaking off, and causing more problems toward the center of the wafer.
>>>
>
>Forgot to ask how they cured their yield problems in the end and also sounds like
>the problems IBM have been having too with Low-K.

AMd said that it was a combination of three things.

Edge engineering, improved wafer handling, and altered deposition chamber (procedure?).

Basically the low -K material was flaking off, so it seems that the solution was to do some special work at the edges so they won't begin to come off, and handle the wafers rather gingerly. That was the gist of the handwaving I remembered.

The presenter had some nice slides. Hopefully they'll release them.

>Also did they mention when they were having the problem and when it was fixed ?

They didn't exactly say, but I'm guessing from the unlabelled defect reduction chart that it was 2 quarters ago.

>>Fascinating. It just shows that these guys are almost like explorers going into
>>unchartered territory where you never know what is lurking round the corner. You
>>and Paul have produced a fine body of work here, don't get disheartened, we all
>>read it and appreciate it even if we are not always vocal about it. :-)

You should attend IEDM sometimes, it's pretty much of the leading edge of where computer engineering starts (IMHO), so there's a lot of chaotic development going in all sorts of directions. They're all pretty much attacking the same problems, but trying their own independent solutions. So it's all uncharted territory. (who's built a 4 Gbit Flash chip before, in the history of mankind? Who's built electro-mechanical cantilevers for data storage?)

Coupled that with the fact that process generations are now moving at 1 generation every 2 years, you see that multitudes of solutions to different problems are suggested every year, and they'll change rapidly in the year after.
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Report from IEDM 2003 OnlineDavid Kanter2003/12/09 03:31 AM
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        Har (NT)David Wang2003/12/09 06:30 PM
        AMD discloses that its yield problem on the 130nmmas2003/12/10 02:22 AM
          AMD discloses that its yield problem on the 130nmDavid Wang2003/12/10 04:31 PM
            AMD discloses that its yield problem on the 130nmmas2003/12/11 07:59 AM
              AMD discloses that its yield problem on the 130nmmas2003/12/11 08:15 AM
                AMD discloses that its yield problem on the 130nmDavid Wang2003/12/11 11:34 AM
      Report from IEDM 2003 OnlineDavid Wang2003/12/09 06:28 PM
        Report from IEDM 2003 OnlineDean Kent2003/12/09 06:39 PM
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      Report from IEDM 2003 OnlineMarc M.2003/12/10 09:50 AM
        Report from IEDM 2003 OnlineDavid Kanter2003/12/10 11:31 PM
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    Report from IEDM 2003 OnlineDavid Wang2003/12/09 08:00 PM
      Report from IEDM 2003 OnlineDavid Kanter2003/12/09 08:42 PM
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