David Wang's IEDM Article now available

Article: Process Technology Advancements at IEDM 2007
By: IntelUser2000 (Intel_user2000.delete@this.yahoo.ca), January 22, 2008 4:28 am
Room: Moderated Discussions
David Wang (dwang@not.here.com) on 1/21/08 wrote:
---------------------------
>Anders Jensen (@.) on 1/21/08 wrote:
>---------------------------
>>Nice article! Thanks a lot. Just wondering about on thing.
>>
>>Updated Process Technology Cross Comparison chart shows a value of just 1 nm for
>>"high performance/Intel/2007/t_ox". I thought the t_ox value of Intel's 45 nm was
>>much more than 1 nm due to its High-k materials.
>
>Good catch.
>
>One caveat is that there's no standard way of measuring tox, so just take the self-reported
>tox numbers with a grain of salt. More as a general reference than anything really useful.
>
>However, more importantly to the point here is that I forgot to add a footnote
>to Intel's reported tox number on 45 nm - it's reported in units of EOT (equivalent
>oxide thickness), not physical thickness. That was a question I noted down to go
>back and chase down, but never did. I will take a note to see if Intel will give
>out the physical gate thickness on the 45 nm process.
>
>David
>

I know quite long time ago when Intel first demonstrated High-K Metal gate devices, they said the tox was 3.0nm. Perhaps they are using similar thickness...
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David Wang's IEDM Article now availableDavid Kanter2008/01/20 10:43 PM
  David Wang's IEDM Article now availableDoug Siebert2008/01/21 12:02 AM
    David Wang's IEDM Article now availableDavid Wang2008/01/21 01:00 PM
      David Wang's IEDM Article now availableAlberto2008/01/21 02:40 PM
    David Wang's IEDM Article now availableAlberto2008/01/21 03:24 PM
  David Wang's IEDM Article now availablejumpingjack2008/01/21 01:07 AM
  David Wang's IEDM Article now availableAnders Jensen2008/01/21 02:15 AM
    David Wang's IEDM Article now availableDavid Wang2008/01/21 12:36 PM
      David Wang's IEDM Article now availableIntelUser20002008/01/22 04:28 AM
        David Wang's IEDM Article now availablePotatoswatter2008/01/22 06:18 AM
          David Wang's IEDM Article now availableDavid Wang2008/01/22 08:26 PM
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